JPS6324407Y2 - - Google Patents
Info
- Publication number
- JPS6324407Y2 JPS6324407Y2 JP433581U JP433581U JPS6324407Y2 JP S6324407 Y2 JPS6324407 Y2 JP S6324407Y2 JP 433581 U JP433581 U JP 433581U JP 433581 U JP433581 U JP 433581U JP S6324407 Y2 JPS6324407 Y2 JP S6324407Y2
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- measured
- main body
- receiver
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP433581U JPS6324407Y2 (en]) | 1981-01-16 | 1981-01-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP433581U JPS6324407Y2 (en]) | 1981-01-16 | 1981-01-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57118306U JPS57118306U (en]) | 1982-07-22 |
JPS6324407Y2 true JPS6324407Y2 (en]) | 1988-07-05 |
Family
ID=29802765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP433581U Expired JPS6324407Y2 (en]) | 1981-01-16 | 1981-01-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6324407Y2 (en]) |
-
1981
- 1981-01-16 JP JP433581U patent/JPS6324407Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57118306U (en]) | 1982-07-22 |
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